The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
May. 27, 2011
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Hitachinaka, JP;
Yoshimasa Ohshima, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Taketo Ueno, Fujisawa, JP;
Hiroyuki Nakano, Yokohama, JP;
Takahiro Jingu, Takasaki, JP;
Hisashi Hatano, Kamisato, JP;
Yukihisa Mohara, Kamisato, JP;
Seiji Otani, Kamisato, JP;
Takahiro Togashi, Kamisato, JP;
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Hitachinaka, JP;
Yoshimasa Ohshima, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Taketo Ueno, Fujisawa, JP;
Hiroyuki Nakano, Yokohama, JP;
Takahiro Jingu, Takasaki, JP;
Hisashi Hatano, Kamisato, JP;
Yukihisa Mohara, Kamisato, JP;
Seiji Otani, Kamisato, JP;
Takahiro Togashi, Kamisato, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.