The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Aug. 11, 2005
Eric G. Webb, West Linn, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
David Mark Dinneen, Portland, OR (US);
Edmund B. Minshall, Sherwood, OR (US);
Christopher M. Bartlett, Beaverton, OR (US);
R. Marshall Stowell, Wilsonville, OR (US);
Mark T. Winslow, Camas, WA (US);
Avishai Kepten, Lake Oswego, OR (US);
Jingbin Feng, Lake Oswego, OR (US);
Norman D. Kaplan, Portland, OR (US);
Richard K. Lyons, Sandy, OR (US);
John B. Alexy, West Linn, OR (US);
Eric G. Webb, West Linn, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
David Mark Dinneen, Portland, OR (US);
Edmund B. Minshall, Sherwood, OR (US);
Christopher M. Bartlett, Beaverton, OR (US);
R. Marshall Stowell, Wilsonville, OR (US);
Mark T. Winslow, Camas, WA (US);
Avishai Kepten, Lake Oswego, OR (US);
Jingbin Feng, Lake Oswego, OR (US);
Norman D. Kaplan, Portland, OR (US);
Richard K. Lyons, Sandy, OR (US);
John B. Alexy, West Linn, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A main reservoir holds cool reactant liquid. A reaction vessel for treating a substrate is connected to the main reservoir by a feed conduit. A heater is configured to heat reactant liquid in the feed conduit before the liquid enters the reaction vessel. Preferably, the heater is a microwave heater. A recycle conduit connects the reaction vessel with the main reservoir. Preferably, a recycle cooler cools reactant liquid in the recycle conduit before the liquid returns to the main reservoir. Preferably, an accumulation vessel is integrated in the feed conduit for accumulating, heating, conditioning and monitoring reactant liquid before it enters the reaction vessel. Preferably, a recycle accumulator vessel is integrated in the recycle conduit to accommodate reactant liquid as it empties out of the reaction vessel.