Company Filing History:
Years Active: 2010-2017
Title: The Innovations of Christopher M Bartlett
Introduction
Christopher M Bartlett is an accomplished inventor based in Beaverton, OR (US). He holds a total of 4 patents that showcase his expertise in the field of technology and engineering. His work primarily focuses on enhancing processes in the semiconductor industry.
Latest Patents
One of his latest patents is a vision-based wafer notch position measurement system. This innovative wafer alignment system includes an image capture device that captures an image of a wafer positioned on a pedestal. An image analysis module analyzes the image to detect an edge of the wafer and a notch formed in the edge of the wafer. It calculates, based on the position of the notch, first and second edge positions corresponding to the edge of the wafer. An offset calculation module then calculates an angular offset of the wafer based on the first position and the second edge positions. Finally, a system control module controls the transfer of the wafer from the pedestal to a process cell based on the angular offset.
Another significant patent is a temperature-controlled showerhead for high-temperature operations. This assembly for chemical vapor deposition (CVD) chambers enhances heat dissipation to provide accurate temperature control of the showerhead face plate. It maintains temperatures substantially lower than surrounding components. Heat dissipates by conduction through a showerhead stem and is removed by a heat exchanger mounted outside of the vacuum environment. Heat is supplied by a heating element inserted into the stem of the showerhead, and temperature is controlled using feedback supplied by a temperature sensor installed in the stem and in thermal contact with the face plate.
Career Highlights
Christopher has worked with notable companies in the industry, including Novellus Systems Incorporated and Lam Research Corporation. His contributions to these organizations have significantly advanced their technological capabilities.
Collaborations
Throughout his career, Christopher has collaborated with talented individuals such as Richard K Lyons and Jingbin Feng. These partnerships have fostered innovation and creativity in his projects.
Conclusion
Christopher M Bartlett is a notable inventor whose work has made a significant impact in the semiconductor industry. His innovative patents and collaborations reflect his dedication to advancing technology.