The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Dec. 18, 2009
Christopher M. Bartlett, Beaverton, OR (US);
Ming LI, West Linn, OR (US);
Jon Henri, West Linn, OR (US);
Marshall R. Stowell, Wilsonville, OR (US);
Mohammed Sabri, Beaverton, OR (US);
Christopher M. Bartlett, Beaverton, OR (US);
Ming Li, West Linn, OR (US);
Jon Henri, West Linn, OR (US);
Marshall R. Stowell, Wilsonville, OR (US);
Mohammed Sabri, Beaverton, OR (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
A temperature controlled showerhead assembly for chemical vapor deposition (CVD) chambers enhances heat dissipation to provide accurate temperature control of the showerhead face plate and maintain temperatures substantially lower than surrounding components. Heat dissipates by conduction through a showerhead stem and removed by the heat exchanger mounted outside of the vacuum environment. Heat is supplied by a heating element inserted into the steam of the showerhead. Temperature is controlled using feedback supplied by a temperature sensor installed in the stem and in thermal contact with the face plate.