Yury Yuditsky

Title: Yury Yuditsky: Innovator in Semiconductor Technology

Introduction

Yury Yuditsky is a prominent inventor based in Mountain View, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His innovative work focuses on improving defect inspection processes and beam alignment systems.

Latest Patents

One of Yuditsky's latest patents is titled "Large-particle monitoring with laser power control for defect inspection." This invention involves inspecting a semiconductor wafer using a main laser beam and a secondary laser beam. The secondary laser beam, which has lower power than the main laser beam, leads the main beam to detect particles on the wafer that meet a specific size threshold. Upon detection, both laser beams' power is reduced, allowing the particle to pass through the main beam safely. Afterward, the power levels are restored in a controlled manner.

Another notable patent is the "System and method for compensation of illumination beam misalignment." This system includes a beam steering assembly that adjusts an incident beam to create a corrected beam. It also features a beam monitoring assembly that generates data for the corrected beam, including offset parameters. A controller calculates differences between zero parameters and offset parameters, directing the beam steering assembly to make necessary adjustments.

Career Highlights

Yury Yuditsky has worked with notable companies in the semiconductor industry, including KLA-Tencor Corporation and KLA Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.

Collaborations

Yuditsky has collaborated with talented individuals in his field, including Anatoly Romanovsky and Ivan Maleev. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Yury Yuditsky's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.