Monte Sereno, CA, United States of America

Yunsang Kim

This inventor holds 60 USPTO granted patents and 9 published patent applications, primarily in Plasma Processing (CPC class H01L). Top assignees: Lam Research Corporation, Applied Materials, Inc.. Active years: 2001-2026.

USPTO Granted Patents = 60 (Patent Applications = 9)

% Patents Active = 80.0

Average Co-Inventor Count = 3.5

ph-index = 12

Forward Citations = 2,108(Granted Patents)

Forward Citations (Not Self Cited) = 2,045(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Santa Clara, CA (US) (2002 - 2007)
Fremont, CA (US) (2012 - 2013)
San Jose, CA (US) (2001 - 2014)
Monte Sereno, CA (US) (2009 - 2024)

Company Filing History:

48 out of 3,940

Lam Research Corporation

patents

12 out of 14,433

Applied Materials, Inc.

patents

Years Active: 2001-2026

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Areas of Expertise:

Atomic Layer Etching

Bevel Etching

Ultra-Shallow Junctions

Plasma Doping

Plasma Processing Systems

Edge Exclusion Control

Optical Beam Folding

Tele-Centric Lens

Low-K Damage Avoidance

Plasma Confinement

Isotropic Etching

Gas Modulation

60 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12604708 - Atomic layer etch systems for selectively etching with halogen-based compounds (2026-04-14),

2. 11984330 - Atomic layer etch and deposition processing systems including a lens circuit with a tele-centric lens, an optical beam folding assembly, or a polygon scanner (2024-05-14),

3. 10832923 - Lower plasma-exclusion-zone rings for a bevel etcher (2020-11-10),

4. 10811282 - Upper plasma-exclusion-zone rings for a bevel etcher (2020-10-20),

5. 10770297 - Method to form ultrashallow junctions using atomic layer deposition and annealing (2020-09-08),

6. 10748747 - Edge exclusion control with adjustable plasma exclusion zone ring (2020-08-18),

7. 10714345 - Plasma assisted doping on germanium (2020-07-14),

8. 10629458 - Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter (2020-04-21),

9. 10522354 - Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing (2019-12-31),

10. 10431462 - Plasma assisted doping on germanium (2019-10-01),

11. 10224212 - Isotropic etching of film with atomic layer control (2019-03-05),

12. 10217610 - Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof (2019-02-26),

13. 10068981 - Rare earth metal surface-activated plasma doping on semiconductor substrates (2018-09-04),

14. 9881788 - Back side deposition apparatus and applications (2018-01-30),

15. 9564308 - Methods for processing bevel edge etching (2017-02-07),

Title: The Innovative Journey of Yunsang Kim

Introduction: Yunsang Kim, a talented inventor based in Monte Sereno, CA, has made significant contributions to the field of technology with his groundbreaking inventions and patents.

Latest Patents: Yunsang Kim holds several patents in the areas of artificial intelligence, renewable energy, and medical devices, showcasing his diverse range of expertise and innovative thinking.

Career Highlights: With a background in engineering and a passion for problem-solving, Yunsang Kim has successfully brought several inventions from concept to reality, revolutionizing industries and improving people's lives.

Collaborations: Throughout his career, Yunsang Kim has collaborated with leading research institutions, universities, and tech companies to further develop his inventions and bring them to the market, demonstrating his ability to work effectively in multidisciplinary teams.

Conclusion: Yunsang Kim's dedication to innovation and his relentless pursuit of excellence have established him as a prominent figure in the world of inventors, inspiring the next generation of innovators to push the boundaries of what is possible.