Company Filing History:

8 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

patents

1 out of 9,138

Industrial Technology Research Institute

patents

1 out of 1,712

National Taiwan University

patents

Years Active: 2016-2025

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10 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12424449 - CMP system and method of use (2025-09-23),

2. 11984323 - CMP system and method of use (2024-05-14),

3. 11069533 - CMP system and method of use (2021-07-20),

4. 10957609 - Detecting the cleanness of wafer after post-CMP cleaning (2021-03-23),

5. 10461690 - Defect inspection method and system for solar cell (2019-10-29),

6. 10157801 - Detecting the cleanness of wafer after post-CMP cleaning (2018-12-18),

7. 9679782 - Planarization method, method for manufacturing semiconductor structure, and semiconductor structure (2017-06-13),

8. 9518927 - Surface-enhanced raman scattering substrate and manufacturing method thereof (2016-12-13),

9. 9337066 - Wafer cleaning module (2016-05-10),

10. 9281192 - CMP-friendly coatings for planar recessing or removing of variable-height layers (2016-03-08),

Title: Yu-Ting Yen: Innovator in Chemical Mechanical Planarization Technology

Introduction

Yu-Ting Yen is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of chemical mechanical planarization (CMP) technology. With a total of 10 patents to his name, Yen has established himself as a key figure in the semiconductor industry.

Latest Patents

One of his latest patents is a CMP system and method of use. This innovative system includes a capacitive deionization module (CDM) designed for removing ions from a solution. The apparatus features a planarization unit for planarizing a wafer, a cleaning unit for cleaning the wafer, and a wafer transportation unit for moving the wafer between the planarization and cleaning units. The inclusion of the capacitive deionization module enhances the efficiency of the process by ensuring the solution used in the planarization and cleaning units is free from unwanted ions.

Career Highlights

Yu-Ting Yen has worked with notable companies such as Taiwan Semiconductor Manufacturing Company and the Industrial Technology Research Institute. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor manufacturing.

Collaborations

Yen has collaborated with several talented individuals in his field, including Te-Chien Hou and Cheng-Yu Kuo. These partnerships have fostered innovation and have been instrumental in the development of new technologies.

Conclusion

Yu-Ting Yen's contributions to CMP technology and his impressive portfolio of patents highlight his role as a leading inventor in the semiconductor industry. His work continues to influence advancements in manufacturing processes, making him a significant figure in the field.

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