Kofu, Japan

Yoshio Kumagai


Average Co-Inventor Count = 2.2

ph-index = 7

Forward Citations = 177(Granted Patents)


Location History:

  • Kofu, JP (1991 - 1993)
  • Yamanashi-ken, JP (1998 - 1999)
  • Shiranemachi, JP (1999)
  • Nirasaki, JP (2003)

Company Filing History:


Years Active: 1991-2003

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7 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Yoshio Kumagai

Introduction

Yoshio Kumagai is a prominent inventor based in Kofu, Japan. He has made significant contributions to the field of substrate processing, holding a total of 7 patents. His work has been instrumental in advancing technologies related to wafer cleaning and drying methods.

Latest Patents

Kumagai's latest patents include a substrate rinsing and drying method. This innovative process involves dipping wafers in pure water and subsequently introducing dichloromethane into the processing bath. This transition allows for the effective drying of the wafers without leaving water marks or dissolving the resist. Another notable patent is a substrate washing method, which outlines a comprehensive procedure for washing substrates using a processing vessel. This method ensures that wafers are thoroughly cleaned and safely handled throughout the washing process.

Career Highlights

Throughout his career, Yoshio Kumagai has worked with leading companies in the technology sector. He has been associated with Tokyo Electron Limited and Kabushiki Kaisha Toshiba, where he contributed to various innovative projects. His expertise in substrate processing has made him a valuable asset in these organizations.

Collaborations

Kumagai has collaborated with notable colleagues, including Naoki Shindo and Yuuji Kamikawa. These partnerships have fostered a collaborative environment that has led to the development of groundbreaking technologies in the field.

Conclusion

Yoshio Kumagai's contributions to substrate processing and his innovative patents have significantly impacted the industry. His work continues to influence advancements in wafer technology, showcasing the importance of innovation in this field.

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