The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 1993
Filed:
Nov. 15, 1991
Applicant:
Inventor:
Yoshio Kumagai, Kofu, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ;
U.S. Cl.
CPC ...
134066 ; 134133 ; 134902 ; 454 57 ; 454191 ;
Abstract
A cleaning device in the present invention comprises cleaning chambers each for cleaning subjects to be cleaned, transport units for transporting the subjects, transport chambers each having one of the transport units, first decompression means for decompressing each of the transport chambers to keep its internal atmospheric pressure lower than the external atmospheric pressure of the cleaning device by 0 through 0.02 mmH.sub.2 O, and second decompression means for decompressing each of the cleaning chambers to keep its internal atmospheric pressure lower than the internal atmospheric pressure of each of the transport chambers by 0 through 0.02 mmH.sub.2 O.