Company Filing History:
Years Active: 2004-2009
Title: The Innovations of Yoshihiro Sugita
Introduction
Yoshihiro Sugita is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving the performance and reliability of semiconductor devices.
Latest Patents
One of his latest patents is a semiconductor device and method for fabricating the same. This invention involves inserting a permeation preventing film of a silicon nitride film between a silicon substrate and a High-k gate insulation film. This design prevents the High-k gate insulation film from losing oxygen during the oxygen anneal process, which occurs after the formation of the gate electrode layer. The silicon nitride film transforms into a silicon oxide nitride film without altering the film thickness, thus preventing deterioration of the High-k gate insulation film's characteristics due to oxygen loss. This innovation ensures that the semiconductor device maintains its performance without experiencing a shift in the threshold voltage.
Another notable patent by Sugita is a semiconductor device and method of manufacturing the same. In this invention, a p-well is formed on the surface of a silicon substrate, followed by the creation of element isolation insulating films. A thin silicon oxide film is then applied over the entire surface, topped with an insulating film that contains a rare earth metal, such as lanthanum or yttrium, along with aluminum. A polysilicon film is subsequently formed on this insulating layer. Through a heat treatment process, the silicon oxide film and the insulating film react to create a silicate film that incorporates the rare earth metal and aluminum, resulting in a single silicate film.
Career Highlights
Yoshihiro Sugita has worked with notable companies in the technology sector, including Fujitsu Corporation and Fujitsu Microelectronics Limited. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.
Collaborations
Throughout his career, Sugita has collaborated with talented individuals such as Kiyoshi Irino and Yusuke Morisaki. These partnerships have contributed to the advancement of his inventions and the overall progress in the semiconductor field.
Conclusion
Yoshihiro Sugita's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His innovative approaches continue to shape the future of semiconductor devices, ensuring enhanced performance and reliability.