The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Aug. 05, 2003
Yoshihiro Sugita, Kawasaki, JP;
Yusuke Morisaki, Kawasaki, JP;
Kiyoshi Irino, Kawasaki, JP;
Shiqin Xiao, Kawasaki, JP;
Takayuki Ohba, Kawasaki, JP;
Yoshihiro Sugita, Kawasaki, JP;
Yusuke Morisaki, Kawasaki, JP;
Kiyoshi Irino, Kawasaki, JP;
Shiqin Xiao, Kawasaki, JP;
Takayuki Ohba, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
An insulating film made of zirconia or hafnia is formed on the surface of a semiconductor substrate. A partial surface area of the insulating film is covered with a mask pattern. By using the mask pattern as a mask, ions are implanted into a region of the insulating film not covered with the mask pattern to give damages to the insulating film. By using the mask pattern as a mask, a portion of the insulating film is etched.