Company Filing History:
Years Active: 1999-2010
Title: Kiyoshi Irino: Innovator in Inspection Technologies
Introduction
Kiyoshi Irino is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of inspection technologies, holding a total of 10 patents. His innovative approaches have advanced methods for detecting defects in various objects, particularly in semiconductor manufacturing.
Latest Patents
One of Irino's latest patents is a method, system, and apparatus for inspection. This method involves irradiating predetermined particles with a laser beam to measure first scattered light intensities. It also includes irradiating multiple types of defects with the laser beam to measure second scattered light intensities. By determining the types of some defects using the first scattered light intensities, a discrimination line is set to indicate a boundary value of the second scattered light intensities. This allows for effective discrimination of defects on the object.
Another notable patent is an inspecting method and apparatus for manufacturing semiconductor devices. This method efficiently inspects a wafer by examining the chip area for defects. Based on the inspection results, a defect density for each peripheral-zone chip is calculated. A peripheral-zone chip with a high defect density is selected, and the area outward of this chip is inspected for defects. This targeted approach enhances the efficiency of wafer inspections.
Career Highlights
Kiyoshi Irino has worked with notable companies such as Fujitsu Corporation and Fujitsu Microelectronics Limited. His experience in these organizations has allowed him to develop and refine his innovative inspection methods.
Collaborations
Irino has collaborated with talented individuals in his field, including Yusuke Morisaki and Yoshihiro Sugita. Their combined expertise has contributed to the advancement of inspection technologies.
Conclusion
Kiyoshi Irino's work in inspection technologies has significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his dedication to improving defect detection methods. His contributions continue to shape the future of inspection processes.