This inventor holds 28 USPTO granted patents and 2 EPO patents, primarily in Photolithography Technology. Top assignee: Shin-Etsu Chemical Co., Ltd.. Active years: 1992-2015.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Gunma-ken, JP (1997 - 2008)
- Gunma, JP (1992 - 2011)
- Annaka, JP (2012 - 2015)
Company Filing History:
Years Active: 1992-2015
Areas of Expertise:
Title: Innovations by Yoshihiko Nagata: A Leader in Lithography Technology
Introduction
Yoshihiko Nagata, based in Gunma, Japan, is a prominent inventor renowned for his contributions to the field of semiconductor manufacturing. With a total of 28 patents to his name, Nagata’s innovative thinking has led to significant advancements, particularly in lithography technology, which plays a crucial role in the production of integrated circuits.
Latest Patents
Among his latest innovations, Nagata has developed a pellicle for lithography and a method for making it. The pellicle includes a mask-bonding agglutinant layer on one annular face of the pellicle frame, designed with a trapezoidal cross-section, ensuring that the angle included between the side wall and the annular face is 90 degrees or smaller, optimizing its functionality in semiconductor manufacturing. Additionally, he has patented a method for hermetically closing an air-tight bag for pellicles. This innovative method allows for the air-tight enclosure of pellicle cases within a single film-like bag that protects against dust, achieved by folding the bag similar to origami and consolidating it with an adhesive material.
Career Highlights
Yoshihiko Nagata currently works for Shin-Etsu Chemical Co., Ltd., where he continues to push the boundaries of lithography technology. His work has positioned him as a key player in enhancing the efficiency and effectiveness of the semiconductor fabrication process, thereby contributing not only to his company but also to the industry as a whole.
Collaborations
Throughout his career, Nagata has collaborated with talented colleagues, including Meguru Kashida and Yoshihiro Kubota. Together, they have contributed to various projects that have resulted in groundbreaking innovations in the field, showcasing the power of teamwork in advancing technology.
Conclusion
Yoshihiko Nagata’s dedication to innovation and his impressive portfolio of patents demonstrate his significant impact on the semiconductor industry. As he continues to develop pioneering technologies, his work will undoubtedly play a vital role in shaping the future of lithography and semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile