Yong-Sun Ko

USPTO Granted Patents = 49 (Patent Applications = 2)

Average Co-Inventor Count = 4.1

ph-index = 7

Forward Citations = 235(Granted Patents)

Location History:

Suwon, KR (1999 - 2006)
Yongin-si, KR (2006)
Gyeonngi-do, KR (2008)
Kyunggi-do, KR (2007 - 2009)
Gyeonggi-do, KR (2005 - 2010)
Plano, TX (US) (2010)
Suwon-si, KR (2004 - 2024)

Company Filing History:

49 out of 131,214

Samsung Electronics Co., Ltd.

where one patent can have more than one assignee

Years Active: 1999-2024

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49 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11887868 - Substrate processing apparatus and apparatus for manufacturing integrated circuit device (2024-01-30),

2. 11664243 - Substrate processing apparatus (2023-05-30),

3. 11361960 - Substrate processing apparatus and substrate processing system including the same (2022-06-14),

4. 10985036 - Substrate processing apparatus and apparatus for manufacturing integrated circuit device (2021-04-20),

5. 10818522 - Process chamber for a supercritical process and apparatus for treating substrates having the same (2020-10-27),

6. 10795263 - Compositions for removing photoresist (2020-10-06),

7. 10707071 - Substrate processing apparatus and substrate processing system including the same (2020-07-07),

8. 10576582 - Spot heater and device for cleaning wafer using the same (2020-03-03),

9. 10438891 - Integrated circuit device (2019-10-08),

10. 10029332 - Spot heater and device for cleaning wafer using the same (2018-07-24),

11. 10025192 - Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate (2018-07-17),

12. 9903651 - Sealing member and substrate processing apparatus including the same (2018-02-27),

13. 9394509 - Cleaning solution composition and method of cleaning semiconductor device using the same (2016-07-19),

14. 8592315 - Chemical mechanical polishing method (2013-11-26),

15. 8084801 - Cell structure for a semiconductor memory device and method of fabricating the same (2011-12-27),

Title: Innovations by Yong-Sun Ko: Pioneering Substrate Processing Technologies

Introduction

Yong-Sun Ko, based in Suwon-si, South Korea, is a prominent inventor in the field of substrate processing technology. With an impressive portfolio of 49 patents, he has contributed significantly to advancements in manufacturing integrated circuit devices and enhancing substrate processing methodologies.

Latest Patents

Among his latest innovations, Yong-Sun Ko has developed two notable patents:

1. **Substrate Processing Apparatus**: This patent describes a substrate processing apparatus featuring a vessel that provides a dedicated processing space, a substrate support for holding the substrate, and a barrier designed to surround the edge of the substrate. This innovative design is aimed at improving the efficiency and effectiveness of substrate processing.

2. **Substrate Processing Apparatus with Advanced Features**: This invention includes a spin chuck to rotate the substrate, chemical liquid and deionized water nozzles for surface treatment, and a laser device that emits a pulse laser beam with a period of 10 seconds or less for precise etching of the substrate's edge. This apparatus enhances the capabilities of substrate processing in manufacturing environments.

Career Highlights

Yong-Sun Ko has had a successful career, particularly at leading companies in the technology sector. He has held positions at Samsung Electronics Co., Ltd. and Semes Co., Ltd., where he focused on the development of advanced substrate processing technologies.

Collaborations

Throughout his career, Yong-Sun Ko has worked alongside notable coworkers such as Kyung-Hyun Kim and Byoung-Moon Yoon. These collaborations have contributed to the innovation and refinement of his patented technologies.

Conclusion

Yong-Sun Ko’s contributions to substrate processing technology are noteworthy and reflect a deep commitment to innovation. His patents not only enhance current processes but also pave the way for future advancements in integrated circuit manufacturing. With a strong foundation and collaborative efforts, Ko continues to establish himself as a leading inventor in his field.

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