The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

May. 23, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Jung-Min Oh, Incheon, KR;

Mi-Hyun Park, Seongnam-si, KR;

Hyo-San Lee, Hwaseong-si, KR;

Ji-Hoon Jeong, Suwon-si, KR;

Yong-Sun Ko, Suwon-si, KR;

In-Gi Kim, Hwaseong-si, KR;

Na-Rim Kim, Daegu, KR;

Sang-Tae Kim, Iksan-si, KR;

Seong-Min Kim, Iksan-si, KR;

Kyong-Ho Lee, Osan-si, KR;

Assignees:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

DONGWOO FINE-CHEM, Pyeongtaek-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); H01L 21/8238 (2006.01); H01L 21/266 (2006.01); H01L 29/16 (2006.01); H01L 21/311 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/426 (2013.01); G03F 7/039 (2013.01); G03F 7/42 (2013.01); G03F 7/422 (2013.01); G03F 7/425 (2013.01); H01L 21/266 (2013.01); H01L 21/31133 (2013.01); H01L 21/823814 (2013.01); H01L 21/823828 (2013.01); H01L 29/16 (2013.01);
Abstract

A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.


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