Hyo-San Lee

USPTO Granted Patents = 28 (Patent Applications = 4)

Average Co-Inventor Count = 5.8

ph-index = 6

Forward Citations = 147(Granted Patents)

Location History:

Suwon-si, KR (2007 - 2017)
Hwaseong-si, KR (2016 - 2022)

Company Filing History:

28 out of 131,214

Samsung Electronics Co., Ltd.

Pukyong National University

patents

4. 1 out of 38

Ehwa Diamond Industrial Co., Ltd.

where one patent can have more than one assignee

Years Active: 2007-2022

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28 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11227761 - Method of removing chemicals from a substrate (2022-01-18),

2. 11142694 - Etchant composition and method of fabricating semiconductor device (2021-10-12),

3. 10795263 - Compositions for removing photoresist (2020-10-06),

4. 10679843 - Method of treating substrates using supercritical fluids (2020-06-09),

5. 10668403 - Source supplier for a supercritical fluid, substrate processing apparatus having the same (2020-06-02),

6. 10576582 - Spot heater and device for cleaning wafer using the same (2020-03-03),

7. 10525566 - Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same (2020-01-07),

8. 10395951 - Method of cleaning a substrate and apparatus for performing the same (2019-08-27),

9. 10332762 - Chemical liquid supply apparatus and semiconductor processing apparatus having the same (2019-06-25),

10. 10083829 - Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same (2018-09-25),

11. 10029332 - Spot heater and device for cleaning wafer using the same (2018-07-24),

12. 10025192 - Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate (2018-07-17),

13. 9754806 - Apparatus for treating wafers using supercritical fluid (2017-09-05),

14. 9394509 - Cleaning solution composition and method of cleaning semiconductor device using the same (2016-07-19),

15. 8795541 - Substrate processing method and substrate processing system for performing the same (2014-08-05),

Title: Hyo-San Lee: Innovator in Semiconductor Technology

Introduction

Hyo-San Lee, based in Suwon-si, South Korea, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 28 patents, Lee stands out as an innovator whose work has impacted various aspects of semiconductor processing.

Latest Patents

Hyo-San Lee's latest patents showcase his innovative approach to solving complex chemical processing challenges. One notable patent describes a method of removing chemicals from a substrate, which involves loading a substrate into a process chamber and utilizing a supercritical fluid to create a mixture that effectively separates chemicals from the substrate. The process cleverly alternates between pressure drop and supplemental modes to optimize chemical concentration and flow.

Another of his recent patents is an etchant composition and method of fabricating a semiconductor device. This composition includes an inorganic acid combined with colloidal silica, an ammonium-based additive, and a solvent, tailored precisely to enhance the etching process critical for semiconductor fabrication.

Career Highlights

Throughout his career, Hyo-San Lee has worked with prominent companies, notably Samsung Electronics Co., Ltd. and Dongwoo Fine-chem. These positions have allowed him to develop and refine his skills in semiconductor technology, making substantial contributions to the field.

Collaborations

Collaboration has been key to Hyo-San Lee's success. He has worked alongside esteemed colleagues, including Kun-Tack Lee and Jung-Min Oh. Their joint efforts have fostered advancements in semiconductor fabrication and related technologies, driving innovation in the industry.

Conclusion

Hyo-San Lee's dedication to innovation is evident in his extensive patent portfolio and impactful collaborations. His contributions to semiconductor technology continue to pave the way for future advancements in the field, establishing him as a pivotal inventor in this critical area of research and development.

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