The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Apr. 07, 2017
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Jung-Min Oh, Incheon, KR;

Ji-Hoon Jeong, Suwon-si, KR;

Dong-Gyun Han, Yongin-si, KR;

Kun-Tack Lee, Suwon-si, KR;

Hyo-San Lee, Hwaseong-si, KR;

Yong-Myung Jun, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/02 (2006.01); B01D 11/04 (2006.01); G01N 21/3554 (2014.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); B01D 11/02 (2006.01);
U.S. Cl.
CPC ...
B01D 11/0407 (2013.01); B01D 11/0411 (2013.01); G01N 21/3554 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67028 (2013.01); H01L 21/67034 (2013.01); H01L 21/67109 (2013.01); B01D 11/0203 (2013.01); B01D 11/0403 (2013.01); H01L 21/02101 (2013.01);
Abstract

A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.


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