The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Sep. 10, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Jung-ah Kim, Hwaseong-si, KR;
Young-chan Kim, Suwon-si, KR;
Hyo-san Lee, Hwaseong-si, KR;
Hoon Han, Anyang-si, KR;
Jin-uk Lee, Sejong-si, KR;
Jung-hun Lim, Daejeon, KR;
Ik-hee Kim, Gongju-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Soulbrain Co., Ltd., Seongnam-si, KR;
Abstract
An etchant composition and a method of fabricating a semiconductor device, the composition including an inorganic acid; about 0.01 parts by weight to about 0.5 parts by weight of colloidal silica; about 0.01 parts by weight to about 30 parts by weight of an ammonium-based additive; and about 20 parts by weight to about 50 parts by weight of a solvent, all parts by weight being based on 100 parts by weight of the inorganic acid.