The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Nov. 30, 2017
Samsung Electronics Co., Ltd., Suwon-si, KR;
Young-Hoo Kim, Yongin-si, KR;
Sang-Jine Park, Suwon-si, KR;
Yong-Jhin Cho, Hwaseong-si, KR;
Yeon-Jin Gil, Daegu, KR;
Ji-Hoon Jeong, Suwon-si, KR;
Byung-Kwon Cho, Suwon-si, KR;
Yong-Sun Ko, Suwon-si, KR;
Kun-Tack Lee, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A substrate processing apparatus includes a vessel providing a processing space for processing a substrate, a substrate support supporting the substrate loaded in the processing space, and a barrier between a side wall of the vessel and the substrate support and surrounding an edge of the substrate supported by the substrate support.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile