The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Nov. 17, 2014
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Sang-Won Bae, Suwon-si, KR;
Yong-Sun Ko, Suwon-si, KR;
Seok-Hoon Kim, Seongnam-si, KR;
In-Gi Kim, Hwaseong-si, KR;
Jung-Min Oh, Incheon, KR;
Kun-Tack Lee, Suwon-si, KR;
Hyo-San Lee, Hwaseong-si, KR;
Ji-Hoon Jeong, Suwon-si, KR;
Yong-Jhin Cho, Hwaseong-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); C11D 11/00 (2006.01); H01L 21/02 (2006.01); C11D 7/08 (2006.01); C11D 7/50 (2006.01); C11D 7/10 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); C11D 7/08 (2013.01); C11D 7/10 (2013.01); C11D 7/5022 (2013.01); H01L 21/02068 (2013.01);
Abstract
A cleaning solution composition includes an organic solvent in which a metal fluoride does not dissolve, at least one fluoride compound that generates bifluoride (HF), and deionized water, wherein the deionized water may be included in a concentration of 1.5 wt % or lower based on the total weight of the cleaning solution composition.