Location History:
- Kofu, JP (2002 - 2003)
- Yamanashi, JP (2012 - 2017)
- Nirasaki, JP (2010 - 2018)
Company Filing History:
9 out of 10,295 
1 out of 832,680 Years Active: 2002-2018
Title: Yasushi Aiba: Innovator in Metal Film Technology
Introduction
Yasushi Aiba is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of metal film technology, holding a total of 10 patents. His innovative methods have advanced the way metal films are formed and processed.
Latest Patents
One of Yasushi Aiba's latest patents is a method of forming a metal film on a target substrate that has both complex-shaped and flat portions. This method involves loading the substrate into a chamber maintained under a depressurized atmosphere. A metal chloride gas is sequentially supplied as a raw material gas along with a reduction gas, while purging the chamber during the process. The method includes forming a first metal film by supplying the metal chloride gas at a relatively low flow rate, followed by forming a second metal film at a relatively high flow rate. Another notable patent is a method of reducing stress in a highly stressed metal film. This method includes processing the metal film by supplying a metal chloride gas containing the metal of the film and a reduction gas, and forming a process film on the metal film to alleviate stress.
Career Highlights
Yasushi Aiba has worked with Tokyo Electron Limited, where he has applied his expertise in metal film technology. His work has been instrumental in developing advanced manufacturing processes that enhance the quality and performance of metal films.
Collaborations
Throughout his career, Yasushi Aiba has collaborated with notable professionals in the field, including Takanobu Hotta and Koji Maekawa. These collaborations have contributed to the advancement of metal film technologies and innovations.
Conclusion
Yasushi Aiba's contributions to metal film technology through his patents and collaborations highlight his role as a leading inventor in this field. His innovative methods continue to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.