Location History:
- Sagamihara, JP (1990 - 1991)
- Saitama, JP (2000 - 2013)
- Shiki, JP (2000 - 2016)
Company Filing History:
24 out of 1,000 
2 out of 191 
1 out of 328 
Years Active: 1990-2016
Title: Innovative Contributions of Yasuo Hibino in Dry Etching Technology
Introduction
Yasuo Hibino, a notable inventor based in Shiki, Japan, has made significant contributions to the field of material processing, particularly in dry etching technology. With a remarkable portfolio of 25 patents, Hibino's work demonstrates a commitment to innovation and environmental responsibility in industrial applications.
Latest Patents
Among his latest inventions is a groundbreaking dry etching agent and a corresponding method utilizing this agent. The invention centers on a dry etching agent that includes a fluorinated propyne, represented by the chemical formula CFC≡CX, where X can be H, F, Cl, Br, I, CH, CF, or CFH. This agent also incorporates a variety of gases, including at least one from the categories of O, CO, and COF; and others from the fluorine family, which are essential in ensuring efficient processing. Notably, the dry etching agent is designed to have a minimal environmental impact and offers a broad process window, making it suitable for high-aspect-ratio applications without requiring special substrate excitation procedures.
Career Highlights
Hibino's extensive career includes significant roles at Central Glass Company, Limited and Sagami Chemical Research Center. His work at these companies has been instrumental in advancing technologies related to dry etching agents, reinforcing his position as a leading inventor in his field.
Collaborations
Throughout his career, Yasuo Hibino has collaborated with notable coworkers such as Fuyuhiko Sakyu and Satoshi Yoshikawa. These partnerships have likely contributed to the innovative nature of his patents, allowing for a multidisciplinary approach to problem-solving within the realm of material processing.
Conclusion
Yasuo Hibino's innovative contributions to dry etching technology not only highlight his inventiveness but also showcase the importance of environmentally friendly industrial practices. With a strong foundation built on collaboration and a commitment to innovation, Hibino continues to influence the field significantly through his patents and ongoing work.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.