Central Glass Company, Limited

Sagami Chemical Research Center

Nissan Chemical Industries Limited

Nippon Soda Co., Ltd.

Hodogaya Chemical Co., Ltd.

Toyo Soda Manufacturing Co., Ltd.

Nagaoka University of Technology

Yasuo Hibino

Fuyuhiko Sakyu

Satoru Okamoto

Satoshi Yoshikawa

Ryouichi Tamai

Yoshihiko Gotoh

Akiou Kikuchi

Isamu Mori

Tomonori Umezaki

Akira Ishihara

Ryoichi Tamai

Yoshio Nishiguchi

Naganori Numao

Yasuhisa Asano

Noriko Okazaki

Naoto Takada

Kanako Osafune

Shigeharu Kamado

Toshio Hesaka

Fumihiro Kawagoe

Hideo Hamasaki

Hayato Okumura

Daisuke Yamagata

A dry etching agent according to the present invention contains (A) a fluorinated propyne represented by the chemical formula: CFC&#x2261;CX where X is H, F, Cl, Br, I, CH, CFHor CFH; and either of: (B) at least one kind of gas selected from the group consisting of O, O, CO, CO, COCland COF; (C) at least one kind of gas selected from the group consisting of F, NF, Cl, Br, Iand YFn where Y is Cl, Br or I; and n is an integer of 1 to 5; and (D) at least one kind of gas selected from the group consisting of CF, CHF, CF, CFH, CFH, CF, CFH, CClFH and CF. This dry etching agent has a small environmental load and a wide process window and can be applied for high-aspect-ratio processing without special operations such as substrate excitation.

Dry etching agent and dry etching method using the same

According to the first characteristic of the present invention, there is provided a production process for 1,3,3,3-tetrafluoropropene including: the first step of reacting 1,1,1,3,3-pentachloropropane with hydrogen fluoride thereby obtaining 1-chloro-3,3,3-trifluoropropene; and the second step of reacting 1-chloro-3,3,3-trifluoropropene obtained in the first step with hydrogen fluoride in a gaseous phase in the presence of a fluorination catalyst. According to the second characteristic of the present invention, there is provided a dehydration process including bringing 1,3,3,3-tetrafluoropropene containing at least water into contact with zeolite.

Process for producing 1,3,3,3-tetrafluoropropene

A dry etching agent according to the present invention preferably contains: (A) 1,3,3,3-tetrafluoropropene; (B) at least one kind of additive gas selected from the group consisting of H, O, O, CO, CO, COCl, COF, CFOF, NO, F, NF, Cl, Br, I, CH, CH, CH, CH, CH, CH, CH, HF, HI, HBr, HCl, NO, NHand YFn (where Y represents Cl, Br or I; and n represents an integer satisfying 1&#x2266;n&#x2266;7); and (C) an inert gas. This dry etching agent has less effect on the global environment and can obtain a significant improvement in process window and address processing requirements such as low side etching ratio and high aspect ratio even without any special substrate excitation operation.

Dry etching agent and dry etching method

A production method of 1-chloro-3,3,3-trifluoropropene according to the present invention includes reaction of 1,1,1,3,3-pentachloropropane with hydrogen fluoride, characterized in that the concentrations of respective catalytic components in the 1,1,1,3,3-pentachloropropane as the raw material is controlled to a predetermined level or less. By controlling the concentrations of the respective catalytic components in the 1,1,1,3,3-pentachloropropane to the predetermined level or less, it is possible to improve the problems of shortening of catalyst life, retardation of reaction and scaling or corrosion of equipment in the production of the 1-chloro-3,3,3-trifluoropropene. In addition, the 1,1,1,3,3-pentachloropropane can be obtained selectively with high yield by telomerization reaction of carbon tetrachloride and vinyl chloride. The present invention is thus useful as the method for industrially advantageous, high-yield production of the 1-chloro-3,3,3-trifluoropropene.

Production method for 1-chloro-3,3,3-trifluoropropene

A process for dehydrating a hydrofluorocarbon or hydrochlorofluorocarbon, which can be done by simple equipment, and a continuous process of producing 1,3,3,3-tetrafluoropropene using the dehydration process. The dehydration process includes cooling the hydrofluorocarbon or hydrochlorofluorocarbon in gaseous form containing water with a heat exchanger, thereby condensing and liquefying the hydrofluorocarbon or hydrochlorofluorocarbon while freezing and solidifying the water. The 1,3,3,3-tetrafluoropropene production method includes a first step for fluorinating 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a mixture of 1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifluoropropene, hydrogen fluoride, hydrogen chloride and by-products, or dehydrofluorinating 1,1,1,3,3-pentafluoropropane to obtain a mixture of 1,3,3,3-tetrafluoropropene, unreacted 1,1,1,3,3-pentafluoropropane and by-products, a second step for removing acidic components, a third step for dehydrating the 1,3,3,3-tetrafluoropropene by the above dehydration process, and a fourth step for purifying the 1,3,3,3-tetrafluoropropene by distillation.

Dehydration process of hydrofluorocarbon or hydrochlorofluorocarbon and production method of 1,3,3,3-tetrafluoropropene using the dehydration process

Disclosed is a solvent composition for silicone compounds, containing 1-chloro-3,3,3-trifluoropropene, or a solvent composition for silicone compounds, containing (A) 1-chloro-3,3,3-trifluoropropene and (B) a compound made up of at least one selected from the group consisting of 1,1,2,2-tetrafluoro-1-methoxyethane, 1,1,1,3,3-pentafluorobutane, and 1,1,2,2-tetrafluoro-1-(2,2,2-trifluoroethoxy)ethane. This solvent composition has characteristics of nonflammability and low toxicity, and handling is extremely easy. Coating properties of the silicone compound become good by mixing this solvent composition and the silicone compound.

Solvent composition for silicone compound

A production method of 3,3,3-trifluoropropene includes the step of hydrogenating 1-chloro-3,3,3-trifluoropropene with hydrogen (H) in a gas phase in the presence of either of: (A) a catalyst having carried on a carrier at least one kind of transition metal selected from the group consisting of ruthenium, nickel, rhodium, iridium, iron, osmium and cobalt, or an oxide of said transition metal; (B) an oxide catalyst of copper and manganese; and (C) a catalyst having carried on a carrier palladium and at least one kind of element selected from the group consisting of bismuth, zinc, copper, silver, lanthanum, lead, zirconium, niobium, hafnium, magnesium, tin and arsenic.

Method for producing 3,3,3-trifluoropropene

There is provided according the present invention a process for producing 2-chloro-3,3,3-trifluoropropene, comprising: hydrogenating 1,2-dichloro-3,3,3-trifluoropropene with hydrogen (H) in the presence of a catalyst having a transition metal and a poisoning substance supported on a support. The present production process is industrially advantageous as the target 2-chloro-3,3,3-trifluoropropene can be obtained with high selectivity and high yield under moderate reaction conditions and with easy waste treatment.

Process for production of 2-chloro-3,3,3-trifluoropropene

Disclosed is a method of purifying (Z)-1-chloro-3,3,3-trifluoropropene of the formula [1], comprising: distilling a mixture containing (Z)-1-chloro-3,3,3-trifluoropropene and 1-chloro-1,3,3,3-tetrafluoropropane (CFCHCHClF), wherein the distilling is performed by extractive distillation of the mixture in the coexistence of at least one kind of compound selected from the group consisting of halogenated hydrocarbons of the formula [2], halogenated unsaturated hydrocarbons, nitriles, ketones, carbonates, ethers, esters and alcohols as an extractant

Method of purifying (Z)-1-chloro-3,3,3-trifluoropropene

There is provided a method for producing trans-1,3,3,3-tetrafluoropropene, which includes the step of bringing cis-1,3,3,3-tetrafluoropropene into contact, in a gas phase, with a metal oxide, an activated carbon supporting thereon a metal compound, or a fluorinated derivative thereof, as a catalyst.

Method for producing trans-1,3,3,3-tetrafluoropropene

There is provided according to the present invention a process for producing 1-chloro-3,3,3-trifluoropropene or 1,3,3,3-tetrafluoropropene, including: reacting 1,1,1,3,3-pentafluoropropane with hydrogen chloride in a gas phase in the presence of a solid catalyst. By the use of a specific solid catalyst such as a catalyst in which chromium is supported on alumina or activated carbon or an alumina catalyst, the 1-chloro-3,3,3-trifluoropropene or 1,3,3,3-tetrafluoropropene can be obtained with high yield from the 1,1,1,3,3-pentafluoropropane, which can be commercially available or prepared on an industrial scale.

Process for producing fluorinated propene

There is provided an azeotrope or azeotrope-like composition containing (A) 1,1,2,2-tetrafluoro-1-methoxyethane and (B) a compound formed of at least one selected from the group consisting of (Z)-1-chloro-3,3,3-trifluoropropene, 2-bromo-3,3,3-trifluoropropene, and (E)-2-bromo-1,3,3,3-tetrafluoropropene.

Azeotrope or azeotrope-like composition comprising 1,1,2,2-tetrafluoro-1-methoxyethane

There is provided a method for producing 1,3,3,3-tetrafluoropropene. This method includes dehydrofluorinating 1,1,1,3,3-pentafluoropropane in gas phase in the presence of a zirconium compound-carried catalyst in which a zirconium compound is carried on a metal oxide or activated carbon.

Method for producing 1,3,3,3-tetrafluoropropene

A method of using a protective gas composition comprising a fluorine-containing organic compound and a carrier gas for preventing a rapid oxidation or combustion of a molten magnesium/magnesium alloy alloy in a magnesium or magnesium alloy production process.

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Shiki, Japan

Yasuo Hibino