Tokyo, Japan

Yasumasa Hiroo

USPTO Granted Patents = 14 

 

Average Co-Inventor Count = 2.7

ph-index = 5

Forward Citations = 94(Granted Patents)


Location History:

  • Kanagawa, JP (2004 - 2007)
  • Tokyo, JP (2010 - 2024)

Company Filing History:


Years Active: 2004-2025

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14 patents (USPTO):

Title: Yasumasa Hiroo: Innovator in Substrate Processing Technology

Introduction

Yasumasa Hiroo is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 14 patents. His innovative work focuses on enhancing the efficiency and effectiveness of polishing apparatuses.

Latest Patents

Hiroo's latest patents include a substrate processing apparatus and a method for controlling the dressing of polishing members. This apparatus polishes a substrate by sliding it on a polishing member, featuring a dresser that adjusts the swing speed across various scanning areas. Additionally, it includes a height detection section that measures the surface height of the polishing member, generating a pad profile. Another notable patent involves a polishing apparatus and a polishing member dressing method, which allows for the adjustment of swing speed in scanning areas and the calculation of a height profile predicted value based on a dress model matrix.

Career Highlights

Yasumasa Hiroo has dedicated his career to advancing substrate processing technologies. His work at Ebara Corporation has positioned him as a key figure in the industry, where he continues to innovate and develop new solutions for polishing processes.

Collaborations

Hiroo collaborates with talented coworkers, including Yoichi Kobayashi and Tsuyoshi Ohashi, to further enhance the capabilities of their technologies.

Conclusion

Yasumasa Hiroo's contributions to substrate processing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in polishing processes, making him a valuable asset to Ebara Corporation and the industry as a whole.

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