The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Jun. 18, 2004
Yoichi Kobayashi, Kanagawa, JP;
Yasumasa Hiroo, Kanagawa, JP;
Tsuyoshi Ohashi, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides a substrate transfer controlling apparatus which can easily maximize the throughput of a substrate processing apparatus such as a semiconductor fabrication apparatus, and can satisfy a demand for immediacy of actions of a transfer device. The substrate transfer controlling apparatus comprises an input device () for inputting times required for actions of transfer devices (through) and times required to process substrates in processing devices (through), and a schedule calculator () for calculating execution times of actions of the transfer devices (through) for allowing the time when a final one of the substrates to be processed is fully processed and returned from the substrate processing apparatus to be earliest, based on a predetermined conditional formula including, as parameters, the inputted times. The substrate transfer controlling apparatus further comprises an action commander () for instructing the corresponding transfer devices to perform the actions at the calculated execution times of the actions of the transfer devices (through).