Location History:
- Gwacheon-si, KR (2009 - 2011)
- Gyeonggi-do, KR (2010 - 2011)
Company Filing History:
6 out of 131,214 
1 out of 787 Years Active: 2009-2011
Title: Innovations by Yang-Koo Lee: Pioneering Substrate Treatment and Etching Technologies
Introduction
Yang-Koo Lee, an accomplished inventor based in Gwacheon-si, South Korea, has made significant contributions to the field of substrate treatment and etching technologies. With a total of six patents to his name, Lee's innovative approach addresses critical issues in semiconductor manufacturing processes.
Latest Patents
Among his latest patents, Yang-Koo Lee has developed a substrate treating apparatus and an exposing apparatus designed for cleaning a chuck cleaning tool with a treating bath. The inventive concept enables a chuck member and a chuck cleaning member, which includes a cleaning tool for removing foreign substances from the substrate loading surface, to be positioned adjacent to each other in a treating room. This configuration minimizes contamination of the chuck member and reduces defocus phenomena caused by particles during the exposing process.
Another notable patent involves a composition for etching silicon oxide and methods for forming contact holes. This composition, comprising 0.01 to 2 percent by weight of ammonium bifluoride, 2 to 35 percent by weight of an organic acid, and 0.05 to 1 percent by weight of an inorganic acid, aims to lower damage to metal silicide patterns during the etching process, ultimately enhancing manufacturing reliability.
Career Highlights
Yang-Koo Lee has honed his expertise while working with leading companies such as Samsung Electronics Co., Ltd. and Cheil Industries Inc. His contributions have been instrumental in advancing semiconductor technologies, focusing on efficiency and effectiveness in manufacturing practices.
Collaborations
Throughout his career, Lee has collaborated with notable professionals, including Seung-Ki Chae and Jung-Dae Park. These partnerships have fostered innovative solutions and technological advancements in their shared field.
Conclusion
With six patents and a robust career marked by significant innovations, Yang-Koo Lee is a driving force in the field of substrate treatment and etching technologies. His inventions not only address critical challenges in semiconductor manufacturing but also pave the way for future advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.