The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Dec. 21, 2007
Jae-seok Lee, Gyeonggi-do, KR;
Heung-bin Lim, Gyeonggi-do, KR;
Won-kyung Ryu, Seoul, KR;
Seung-ki Chae, Seoul, KR;
Yang-koo Lee, Gyeonggi-do, KR;
Hun-jung Yi, Gyeonggi-do, KR;
Jae-Seok Lee, Gyeonggi-do, KR;
Heung-Bin Lim, Gyeonggi-do, KR;
Won-Kyung Ryu, Seoul, KR;
Seung-Ki Chae, Seoul, KR;
Yang-Koo Lee, Gyeonggi-do, KR;
Hun-Jung Yi, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
Provided is an apparatus and method for analyzing contaminants on a wafer. The apparatus includes: a wafer holder for supporting a wafer on which contaminants to be analyzed are located, a laser ablation device for irradiating a laser to the wafer to extract a discrete specimen from the wafer, an analysis cell for collecting a discrete specimen from the surface of the wafer by irradiating the laser, and an analysis device connected to the analysis cell for analyzing contaminants from the collected discrete specimen.