Yang-Hung Chang

Title: The Innovative Mind of Yang-Hung Chang: A Closer Look at His Contributions to Semiconductor Technology

Introduction: Yang-Hung Chang, an esteemed inventor based in Taipei, Taiwan, has made significant strides in the semiconductor industry. With a commendable portfolio of 11 patents, his work focuses primarily on overlay control systems, which are crucial for enhancing the precision of semiconductor manufacturing processes.

Latest Patents: Among his latest innovations, Yang-Hung has developed a groundbreaking system for noise reduction in overlay control. This innovative system includes a metrology tool designed to collect overlay errors from patterned substrates, a crucial aspect of semiconductor manufacturing. The controller module associated with this tool generates overlay compensation by identifying and filtering out noise from these errors.

Another notable patent centers on a comprehensive method and system for overlay control. It encompasses selecting a group of wafers, each equipped with a resist pattern, followed by measuring overlay errors at specific locations across the wafers. Furthermore, the use of a computer-generated model enhances the accuracy of selecting the group of wafers and corresponding points for measurement, ultimately resulting in a combined overlay correction map.

Career Highlights: Yang-Hung Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited (TSMC), a leading firm in the semiconductor industry, known for its advanced manufacturing capabilities. His extensive work in overlay control has positioned him as a key contributor in the field, influencing advancements in semiconductor technology.

Collaborations: Throughout his career, Chang has collaborated with notable professionals, including Chih-Ming Ke and Kai-Hsiung Chen, who have contributed to his projects and innovations. Such teamwork highlights the collaborative nature of research and development within the semiconductor industry, facilitating the growth of cutting-edge technologies.

Conclusion: Yang-Hung Chang exemplifies the spirit of innovation within the semiconductor industry. His patents reflect a deep understanding of the complexities involved in overlay control and measurement, marking significant contributions to enhancing manufacturing accuracy. As he continues to develop and refine his ideas, the impact of his work is likely to resonate throughout the technology landscape for years to come.