Kelmis, Belgium

Willi Neff



Average Co-Inventor Count = 3.8

ph-index = 6

Forward Citations = 126(Granted Patents)


Location History:

  • Kelmis, DE (2001 - 2008)
  • Kelmis, BE (1991 - 2010)

Company Filing History:


Years Active: 1991-2010

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13 patents (USPTO):Explore Patents

Title: Willi Neff: Innovator in EUV and Soft X-Ray Radiation Technologies

Introduction

Willi Neff is a prominent inventor based in Kelmis, Belgium, known for his significant contributions to the field of extreme ultraviolet (EUV) and soft X-ray radiation technologies. With a total of 13 patents to his name, Neff has made remarkable advancements that have implications in various scientific and industrial applications.

Latest Patents

Among his latest patents, Neff has developed a method and device for generating EUV radiation and/or soft X-ray radiation. This innovative method describes the formation of plasma using an operating gas within a discharge space that includes at least one radiation emission window and an electrode system. The electrode system is designed to transmit electrical energy to the plasma through introduced charge carriers. To ensure reliable ignition of the plasma at high repetition frequencies, Neff suggests introducing radiation generated by a radiation source into the discharge space to provide discharge carriers. Another notable patent is for an extreme UV and soft X-ray generator, which features a gas discharge source with a gas-filled intermediate electrode space located between two electrodes. This design includes devices for gas admission and evacuation, along with an electrode that has an opening defining an axis of symmetry for radiation discharge.

Career Highlights

Throughout his career, Willi Neff has worked with esteemed organizations such as Koninklijke Philips Corporation N.V. and Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. His work has significantly impacted the development of technologies related to radiation generation.

Collaborations

Neff has collaborated with notable professionals in his field, including Klaus Bergmann and Rainer Lebert. These collaborations have further enhanced his research and innovation capabilities.

Conclusion

Willi Neff's contributions to the field of EUV and soft X-ray radiation technologies demonstrate his expertise and commitment to innovation. His patents reflect a deep understanding of plasma physics and its applications, making him a key figure in advancing these technologies.

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