The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2008

Filed:

Nov. 28, 2003
Applicants:

Guenther Hans Derra, Aachen, DE;

Joseph Robert Rene Pankert, Aachen, DE;

Willi Neff, Kelmis, BE;

Klaus Bergmann, Herzogenrath, DE;

Jeroen Jonkers, Aachen, DE;

Inventors:

Guenther Hans Derra, Aachen, DE;

Joseph Robert Rene Pankert, Aachen, DE;

Willi Neff, Kelmis, BE;

Klaus Bergmann, Herzogenrath, DE;

Jeroen Jonkers, Aachen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/09 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a gas discharge lamp for EUV radiation with an anode () and a hollow cathode (), wherein the hollow cathode () has at least two openings (') and the anode () has a through hole (), which is characterized in that the longitudinal axes (′) of the hollow cathode openings () have a common point of intersection S lying on the axis of symmetry () of the anode opening ().


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