The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Mar. 23, 2002
Jürgen Klein, Aachen, DE;
Willi Neff, Kelmis, BE;
Stefan Seiwart, Aachen, DE;
Klaus Bergmann, Herzogenrath, DE;
Joseph Pankert, Aachen, DE;
Michael Löken, Jülich, DE;
Jürgen Klein, Aachen, DE;
Willi Neff, Kelmis, BE;
Stefan Seiwart, Aachen, DE;
Klaus Bergmann, Herzogenrath, DE;
Joseph Pankert, Aachen, DE;
Michael Löken, Jülich, DE;
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., München, DE;
Philips Corporate Intellectual Property GmbH, Hamburg, DE;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography, wherein a discharge chamber () of a predetermined gas pressure and two electrodes () are used, wherein the electrodes have an opening (), respectively, positioned on the same symmetry axis () and, in the course of a voltage increase () upon reaching a predetermined ignition voltage (U), generate a plasma () located in the area between their openings (), which plasma is a source of the radiation (') to be generated,wherein an ignition of the plasma () is realized by affecting the gas pressure and/or by triggering,and wherein, with the ignition of the plasma (), an energy storage device supplies by means of the electrodes () stored energy into the plasma (), characterized in that the ignition of the plasma () is realized by using a predetermined ignition delay ().