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Years Active: 2006
Title: The Innovative Contributions of Michael Löken
Introduction
Michael Löken, an inventive mind based in Jülich, Germany, has made significant strides in the field of extreme ultraviolet and soft x-ray radiation. With one notable patent to his name, his work is essential for advancements in areas such as EUV lithography.
Latest Patents
Löken holds a patent for a "Method and device for producing extreme ultraviolet radiation and soft x-ray radiation." This innovative method focuses on generating extreme ultraviolet and soft x-ray radiation using a gas discharge operated on the left branch of the Paschen curve. The patent describes a discharge chamber at a predetermined gas pressure, incorporating two electrodes with openings aligned on the same symmetry axis. Upon reaching a specific ignition voltage, the electrodes generate plasma located between their openings, which serves as the radiation source. The innovative process allows for the ignition of the plasma by manipulating gas pressure and includes an energy storage device that supplies energy into the plasma when ignited, characterized by a predetermined ignition delay.
Career Highlights
Throughout his career, Michael Löken has been associated with notable organizations such as the Fraunhofer Society for the Advancement of Applied Research and Philips Corporate Intellectual Property GmbH. His experience in these research institutions and companies has contributed to his understanding and development of advanced technologies, particularly in the realm of radiation methods.
Collaborations
Löken has worked alongside esteemed colleagues, including Jürgen Klein and Willi Neff. Their combined expertise has undoubtedly played a role in the evolution of Löken’s innovative concepts and the successful realization of his patent.
Conclusion
Michael Löken’s contributions to the field of extreme ultraviolet and soft x-ray radiation demonstrate the impact individual inventors can have on advanced technology. His patent not only showcases his inventive talent but also underscores the importance of collaboration in achieving groundbreaking innovation. As he continues to work within the research and development space, further advancements can be anticipated from this skilled inventor.