Eschweiler, Germany

Walter Franken

USPTO Granted Patents = 5 

 

Average Co-Inventor Count = 2.6

ph-index = 2

Forward Citations = 14(Granted Patents)


Company Filing History:


Years Active: 2006-2020

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5 patents (USPTO):Explore Patents

Title: Walter Franken: Innovator in Coating Technologies

Introduction

Walter Franken, an accomplished inventor based in Eschweiler, Germany, has made significant contributions to the field of coating technologies. With a total of five patents to his name, Franken's work primarily focuses on enhancing processes used in semiconductor fabrication and large-area substrate coatings.

Latest Patents

One of Walter Franken's latest patents is a **CVD or PVD reactor for coating large-area substrates**. This innovative coating device comprises a housing and a gas inlet organ secured by a retaining device. The design utilizes a gas outlet surface with openings, while stabilizing the retaining device against deformations and temperature fluctuations. The gas inlet organ features multiple suspension points connected to the retaining device through hanging elements. Unique mechanical stabilization elements, including a retaining frame with vertical walls, enhance the overall functionality of the reactor. Additionally, an actively cooled heat shield is strategically positioned between the retaining device and the gas inlet organ.

Another notable patent is a **transport module for a semiconductor fabrication device or coupling device**. This transport module is designed for efficient loading and unloading of a semiconductor production device's process module. It features a housing with a gas-tight chamber that includes a closure device and an opening that connects to a coupling duct associated with the transport module. The innovative design allows for an evacuated loading and unloading duct to be created after the closure device is opened, ensuring safety and efficiency in semiconductor operations.

Career Highlights

Walter Franken has worked with esteemed companies, including Aixtron SE and Aixtron AG, where he has made a mark in advancing technology within the semiconductor industry. His expertise and innovative solutions have underscored his reputation as a leading inventor in his field.

Collaborations

Throughout his career, Walter has collaborated with talented colleagues such as Markus Gersdorff and Arno Offermanns. These partnerships have allowed for the exchange of ideas and the development of groundbreaking technologies in the coating and semiconductor sectors.

Conclusion

Walter Franken's contributions to the field of coatings and semiconductor fabrication illustrate his inventive spirit and dedication to advancing technology. With numerous patents to his credit, Franken continues to influence the industry and inspire future innovations. His work exemplifies the vital role that inventors play in shaping modern engineering and manufacturing processes.

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