The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Sep. 23, 2009
Markus Gersdorff, Herzogenrath, DE;
Walter Franken, Eschweiler, DE;
Arno Offermanns, Aldenhoven, DE;
Markus Gersdorff, Herzogenrath, DE;
Walter Franken, Eschweiler, DE;
Arno Offermanns, Aldenhoven, DE;
Aixtron SE, Herzogenrath, DE;
Abstract
The invention relates to a device for depositing laterally structured layers on a substrate () situated on a substrate support (), using a shadow mask () lying flat on the substrate surface (') to be coated, the substrate support () having first magnetic zones () for magnetically attracting second magnetic zones () of the shadow mask () that are associated with these first magnetic zones (), wherein, before coating the substrate () and when the shadow mask () is lying on the substrate (), the first magnetic zones () may be brought into an active position in which the second magnetic zones () are drawn toward the substrate surface (′), and, for placement or removal of the shadow mask (), the first magnetic zones may be brought into an inactive position in which the attractive force acting on the second magnetic zones () is reduced. It is important that the first magnetic zones () are formed from magnetic elements, in particular permanent magnetic elements, situated in recesses () in a substrate support surface (′) of the substrate support (), which are spatially associated with the second magnetic zones ().