San Francisco, CA, United States of America

Vinay K Shah

USPTO Granted Patents = 37 

 

Average Co-Inventor Count = 4.2

ph-index = 10

Forward Citations = 356(Granted Patents)


Location History:

  • San Francisco, CA (US) (2006 - 2012)
  • San Mateo, CA (US) (2008 - 2018)

Company Filing History:


Years Active: 2006-2018

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37 patents (USPTO):

Title: Innovations of Vinay K Shah in Vacuum Processing Technologies

Introduction

Vinay K Shah, based in San Francisco, CA, is a prominent inventor with an impressive portfolio of 37 patents. His work primarily focuses on advancements in vacuum processing technologies, showcasing his expertise in creating innovative solutions for the semiconductor industry.

Latest Patents

Among his latest patents, two notable inventions stand out:

1. **System Architecture for Vacuum Processing**: This patent describes a system designed for processing substrates in plasma chambers. The innovation enables all substrate transport and loading/unloading operations to occur in an atmospheric environment, while the actual processing takes place in a vacuum. The configuration allows substrates to be transported through the system using carriers, arranged linearly in the system's chambers. A conveyor returns the carriers to the entry area of the system after processing is completed, allowing for efficient loading and unloading operations.

2. **Sputtering System and Method Using Direction-Dependent Scan Speed or Power**: This invention involves a sputtering system that features a processing chamber equipped with both an inlet port and an outlet port, along with a sputtering target positioned on a chamber wall. The system includes a movable magnet arrangement that slides behind the target. This innovation allows for substrates to be continuously transported past the sputtering target, with the magnet arrangement operating at varying speeds depending on its directional travel, optimizing the sputtering process.

Career Highlights

Vinay has accumulated invaluable experience working with leading companies in the industry, such as Applied Materials, Inc. and Intevac, Inc. These roles not only contributed to his wealth of knowledge but also enabled him to lead innovative projects that have significantly advanced vacuum processing technology.

Collaborations

Throughout his career, Vinay has collaborated with notable professionals including Eric Andrew Englhardt and Jeffrey C Hudgens. This collaboration has fueled the development of groundbreaking technologies and highlighted the importance of teamwork in the field of innovation.

Conclusion

Vinay K Shah's contributions to the field of vacuum processing technologies are remarkable. His 37 patents reflect a deep commitment to innovation and a passion for improving manufacturing processes in the semiconductor industry. Through his inventive spirit and collaborative efforts, Vinay continues to influence the landscape of technology and inspire future inventors.

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