The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Nov. 02, 2011
Vinay K. Shah, San Mateo, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Martin R. Elliott, Pepperell, MA (US);
Vinay K. Shah, San Mateo, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Martin R. Elliott, Pepperell, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect, a loadport is provided. The loadport has a plate adapted to couple to a door of a substrate carrier to open the substrate carrier wherein the plate includes a first opening adapted to couple to a first port in the door of the substrate carrier on a first side of the plate and to couple to a gas source on a second side of the plate, and wherein the loadport is adapted to allow a flow of gas into the substrate carrier via the first opening in the plate. Methods of purging substrate carriers are provided, as are numerous other aspects.