The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Sep. 06, 2012
Applicants:
Vinay K. Shah, San Mateo, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Martin R. Elliott, Pepperell, MA (US);
Inventors:
Vinay K. Shah, San Mateo, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Martin R. Elliott, Pepperell, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.