The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Mar. 04, 2009
Applicants:
Vinay K. Shah, San Mateo, CA (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Inventors:
Vinay K. Shah, San Mateo, CA (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and systems are provided for mapping substrates in a substrate carrier. The invention includes a substrate carrier including one or more windows; and an imaging system coupled to a substrate carrier handling robot and adapted to determine or image substrate positions in the substrate carrier via the one or more windows. Numerous other aspects are provided.