The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Nov. 28, 2011
Mike Rice, Pleasanton, CA (US);
Jeffrey Hudgens, San Francisco, CA (US);
Charles Carlson, Cedar Park, TX (US);
William Tyler Weaver, Austin, TX (US);
Robert Lowrance, Los Gatos, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Dean C. Hruzek, Austin, TX (US);
Dave Silvetti, Morgan Hill, CA (US);
Michael Kuchar, Austin, TX (US);
Kirk Van Katwyk, Tracy, CA (US);
Van Hoskins, Round Rock, TX (US);
Vinay Shah, San Mateo, CA (US);
Mike Rice, Pleasanton, CA (US);
Jeffrey Hudgens, San Francisco, CA (US);
Charles Carlson, Cedar Park, TX (US);
William Tyler Weaver, Austin, TX (US);
Robert Lowrance, Los Gatos, CA (US);
Eric Englhardt, Palo Alto, CA (US);
Dean C. Hruzek, Austin, TX (US);
Dave Silvetti, Morgan Hill, CA (US);
Michael Kuchar, Austin, TX (US);
Kirk Van Katwyk, Tracy, CA (US);
Van Hoskins, Round Rock, TX (US);
Vinay Shah, San Mateo, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.