Company Filing History:
Years Active: 1997-2025
Title: Vandana Krishnamurthy: Innovator in EUV Lithography
Introduction
Vandana Krishnamurthy is a prominent inventor based in Rolla, MO (US). She has made significant contributions to the field of microelectronics, particularly in the area of EUV lithography. With a total of 16 patents to her name, her work has been instrumental in advancing lithographic technologies.
Latest Patents
One of her latest patents focuses on adhesion layers for EUV lithography. This invention provides new lithographic compositions designed for use as EUV adhesion layers. The methods outlined in this patent facilitate the fabrication of microelectronics structures using these compositions. The process involves utilizing an adhesion layer immediately below the photoresist layer. This adhesion layer can be directly applied to the substrate or to any intermediate layers, such as alpha-carbon, spin-on carbon, spin-on silicon hardmask, metal hardmask, or deposited silicon layers. The preferred adhesion layers are formed from spin-coatable, polymeric compositions. This innovative method improves adhesion and effectively reduces or eliminates pattern collapse issues.
Career Highlights
Vandana Krishnamurthy is currently employed at Brewer Science, Inc., where she continues to develop cutting-edge technologies in the field of microelectronics. Her expertise and innovative approach have positioned her as a leader in her field.
Collaborations
Throughout her career, Vandana has collaborated with notable colleagues, including Yubao Wang and Douglas J Guerrero. These partnerships have further enhanced her research and development efforts.
Conclusion
Vandana Krishnamurthy's contributions to EUV lithography and microelectronics are noteworthy. Her innovative patents and collaborative spirit continue to drive advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.