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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9249013 B1

PDFFull Text
Date of Patent:
Feb. 02, 2016

Filed:

Apr. 15, 2013

Silicon hardmask layer for directed self-assembly

Applicant:

Brewer Science Inc., Rolla, MO (US);

Inventors:

Yubao Wang, Rolla, MO (US);

Mary Ann Hockey, Rolla, MO (US);

Douglas J. Guerrero, Rolla, MO (US);

Vandana Krishnamurthy, Rolla, MO (US);

Robert C. Cox, Rolla, MO (US);

Assignee:

Brewer Science Inc., Rolla, MO (US);

Attorney:

Hovey Williams LLP

Primary Examiner:

Kathleen Duda

Int. Cl.
CPC ...
G03F 7/26 (2006.01); B81C 1/00 (2006.01); B81B 1/00 (2006.01); H01L 21/02 (2006.01); H01L 21/033 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0038 (2013.01); B81B 1/00 (2013.01); B81C 1/00031 (2013.01); G03F 7/26 (2013.01); H01L 21/02126 (2013.01); H01L 21/02282 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/31144 (2013.01); B81C 2201/0149 (2013.01); Y10T 428/24612 (2015.01); Y10T 428/24802 (2015.01);
Abstract

Compositions for directed self-assembly patterning techniques are provided which avoid the need for separate anti-reflective coatings and brush neutral layers in the process. Methods for directed self-assembly are also provided in which a self-assembling material, such as a directed self-assembly block copolymer, can be applied directly to the silicon hardmask neutral layer and then self-assembled to form the desired pattern. Directed self-assembly patterned structures are also disclosed herein.

Find Patent Forward Citations

Wang, Yubao. (2016). Silicon hardmask layer for directed self-assembly (U.S. Patent No. 9249013). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9249013

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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