Vaidyanathan Balasubramaniam

Title: The Innovations of Vaidyanathan Balasubramaniam

Introduction

Vaidyanathan Balasubramaniam is an accomplished inventor based in Beverly, MA, with a notable portfolio of 13 patents to his name. His work in the field of plasma processing and etching techniques has contributed significantly to advancements in material processing technologies.

Latest Patents

Among his latest innovations, one notable patent is titled "Method of pattern etching a dielectric film while removing a mask layer." This method details a unique approach for pattern etching a thin film on a substrate. It involves preparing a film stack that includes a dielectric layer and a mask layer. By creating a pattern in the mask layer and transferring it to the dielectric layer through a plasma etching process, Balasubramaniam not only achieves precision in etching but also facilitates the removal of the mask layer during the process. Another significant patent is the "Method and apparatus for multilayer photoresist dry development." This patent elaborates on a technique for etching an organic anti-reflective coating (ARC) layer on a substrate using plasma processing, employing a process gas that includes ammonia and a passivation gas to enhance the etching process.

Career Highlights

Vaidyanathan Balasubramaniam works for Tokyo Electron Limited, a leading company in the semiconductor industry. His innovative methods and apparatus for etching have made considerable contributions to the field, showcasing his expertise and dedication to developing advanced technologies.

Collaborations

Throughout his career, Balasubramaniam has collaborated with notable coworkers, including Eiichi Nishimura and Koichiro Inazawa. Their collective efforts in research and development have fostered a collaborative environment that has led to the creation and enhancement of various technological innovations.

Conclusion

Vaidyanathan Balasubramaniam stands out as an influential figure in the realm of invention and innovation. His extensive patent portfolio reflects his relentless pursuit of excellence in technology and his commitment to propelling the semiconductor industry forward.