Company Filing History:
Years Active: 2015-2025
Title: Tzu-Yu Liu: Innovator in In-Situ Monitoring Technologies
Introduction
Tzu-Yu Liu is a prominent inventor based in San Jose, CA, known for his significant contributions to the field of in-situ monitoring technologies. With a total of 13 patents to his name, Liu has made remarkable advancements that enhance the precision and efficiency of various processes in semiconductor manufacturing.
Latest Patents
Liu's latest patents focus on resistivity-based adjustments for in-situ monitoring. One of his notable inventions involves storing a first resistivity value and a correlation function that relates the thickness of a conductive layer to a signal from an in-situ monitoring system. This system receives a second resistivity value for a conductive layer on a substrate and generates a sequence of thickness values based on signal values from an electromagnetic induction monitoring system. Adjusted thickness values are then created to compensate for variations between the first and second resistivity values, allowing for accurate detection of polishing endpoints or adjustments to polishing parameters.
Another patent by Liu also emphasizes resistivity-based adjustments of measurements from in-situ monitoring. Similar to his previous work, it involves storing resistivity values and generating thickness values based on signal sequences. This innovation further enhances the reliability of monitoring systems during the polishing process.
Career Highlights
Tzu-Yu Liu has established himself as a key figure at Applied Materials, Inc., where he applies his expertise in developing cutting-edge technologies. His work has significantly impacted the semiconductor industry, leading to improved manufacturing processes and product quality.
Collaborations
Liu collaborates with talented individuals such as Kun Xu and Shih-Haur Shen, contributing to a dynamic team that drives innovation in their field.
Conclusion
Tzu-Yu Liu's contributions to in-situ monitoring technologies exemplify the importance of innovation in the semiconductor industry. His patents reflect a commitment to enhancing manufacturing processes, ensuring that his work will continue to influence the field for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.