Tsungyu Hung

Title: Tsungyu Hung: Innovator in Semiconductor Technology

Introduction

Tsungyu Hung is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 9 patents. His work focuses on improving the performance of integrated circuit devices, particularly through innovative semiconductor structures.

Latest Patents

One of Tsungyu Hung's latest patents is titled "Epitaxial structure for source/drain contact for semiconductor structure having fin structure." This invention addresses the need for low-resistance contacts that enhance the performance of integrated circuit devices featuring epitaxial source/drain regions. The low-resistance junctions are formed by removing an upper portion of the source/drain region and replacing it with an epitaxially-grown boron-doped silicon germanium (SiGe) material. The resistivity of the material can be adjusted by varying the temperature during the epitaxy process, allowing for improved electrical contact at the low-resistance junctions.

Another notable patent is "Self-aligned inner spacer on gate-all-around structure and methods of forming the same." This patent describes a semiconductor device and its manufacturing method. The process involves forming a fin over a substrate, which includes a channel region and a source/drain region. A dummy gate structure is created over the substrate and fin, followed by etching a portion of the fin in the source/drain region. The method also includes selectively removing an edge portion of the second semiconductor layer in the channel region, performing a reflow process to form an inner spacer, and epitaxially growing a source/drain feature in the source/drain region.

Career Highlights

Tsungyu Hung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing semiconductor technologies and enhancing device performance.

Collaborations

He has collaborated with notable coworkers, including Pang-Yen Tsai and Pei-Wei Lee, contributing to various innovative projects within the semiconductor field.

Conclusion

Tsungyu Hung's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the development of advanced semiconductor devices.