Location History:
- Itami, JP (1988)
- Tokyo, JP (1997 - 2004)
- Hyogo, JP (2000 - 2005)
Company Filing History:
5 out of 21,351 
2 out of 177 
1 out of 3,781 
Years Active: 1988-2005
Title: Innovations of Toshio Komemura
Introduction
Toshio Komemura is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing and semiconductor manufacturing. With a total of 8 patents to his name, his work has had a considerable impact on technology and industry.
Latest Patents
One of his latest patents is a plasma processing apparatus capable of evaluating process performance. This invention features a high-frequency current detector that identifies high-frequency currents produced when power is supplied to a chamber. The detector sends this information to a computer, which compares it to a reference current to assess process performance. If the currents match, the process is deemed normal; otherwise, it is considered abnormal. This innovation allows for the detection of high-frequency characteristics specific to the apparatus, enabling effective evaluation of process performance.
Another notable patent is a defect inspecting device for substrates in semiconductor manufacturing. This device is integrated into a positioning system for wafers. It utilizes light irradiation on the wafer while it rotates, capturing scattered light to identify defects. If the intensity of the scattered light exceeds a predetermined threshold, the system detects a defect on the wafer, enhancing the quality control process in semiconductor production.
Career Highlights
Toshio Komemura has worked with notable companies such as Mitsubishi Denki Kabushiki Kaisha and Mitsubishi Electric Engineering Company, Limited. His experience in these organizations has contributed to his expertise in the field of plasma processing and semiconductor technology.
Collaborations
Throughout his career, Komemura has collaborated with talented individuals, including Mutumi Tuda and Minoru Hanazaki. These partnerships have fostered innovation and advancement in their respective fields.
Conclusion
Toshio Komemura's contributions to technology through his patents and collaborations highlight his role as a significant inventor in the industry. His work continues to influence advancements in plasma processing and semiconductor manufacturing.