This inventor holds 5 USPTO granted patents and 2 published patent applications and 4 EPO patents. Top assignee: Siltronic Ag. Active years: 2025-2026.
Company Filing History:
Years Active: 2025-2026
Title: Thomas Stettner: Innovator in Epitaxial Layer Deposition
Introduction
Thomas Stettner is a notable inventor based in Waging am See, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the deposition of epitaxial layers on substrate wafers. With a total of 5 patents to his name, Stettner's work is recognized for its innovative approaches and technical precision.
Latest Patents
Stettner's latest patents focus on methods for depositing epitaxial layers on substrate wafers. The first patent describes a method where a characteristic thickness value of the edge of a wafer is determined, including at a notch position. The wafer is placed in a specific area of a susceptor for the deposition process. The method checks the thickness value at the notch position to ensure it does not differ significantly from the maximum thickness value at the edge. This careful placement ensures optimal conditions for layer deposition.
The second patent elaborates on a similar method, emphasizing the measurement of edge geometry of the wafer. It involves placing the wafer in a pocket of a susceptor based on this geometry, followed by heating and passing a process gas over the wafer. The method assigns thickness characteristic values to edge portions based on the edge geometry, ensuring that the layer thicknesses are inversely related to the wafer thicknesses.
Career Highlights
Stettner is currently employed at Siltronic AG, a leading company in the semiconductor industry. His work at Siltronic AG has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing processes.
Collaborations
One of Stettner's notable collaborators is Martin Wengbauer. Their partnership has likely fostered a creative environment that encourages the development of new technologies and methods in the field.
Conclusion
Thomas Stettner is a prominent figure in the semiconductor industry, known for his innovative patents and contributions to epitaxial layer deposition. His work continues to influence advancements in semiconductor technology, showcasing the importance of innovation in this critical field.