Vancouver, WA, United States of America

Tatsuo Nakato


Average Co-Inventor Count = 1.3

ph-index = 7

Forward Citations = 298(Granted Patents)


Company Filing History:


Years Active: 1994-1998

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11 patents (USPTO):Explore Patents

Title: Innovations of Tatsuo Nakato

Introduction

Tatsuo Nakato is a prominent inventor based in Vancouver, WA (US). He holds a total of 11 patents, showcasing his significant contributions to the field of technology and materials science. His work primarily focuses on methods for fabricating advanced semiconductor structures.

Latest Patents

One of Nakato's latest patents is a method for forming silicon-germanium/Si/silicon dioxide heterostructures. This innovative method involves several steps, including providing a monocrystalline silicon substrate, defining a GeSi region within the substrate, and oxidizing part of the silicon cap to produce the desired heterostructure. Another notable patent is related to a silylated photo-resist layer and planarizing method. This technique includes coating a substrate with a planarizing resist layer, softbaking it in the presence of silicon-containing vapor or liquid, and subsequently applying an imaging resist layer. The process emphasizes the use of organic polymers and specific acid moieties to enhance the effectiveness of lithographic processes.

Career Highlights

Throughout his career, Tatsuo Nakato has worked with notable companies such as Sharp Microelectronics Technology, Inc. and Sharp Kabushiki Kaisha Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology and materials engineering.

Collaborations

Nakato has collaborated with esteemed colleagues, including Narayanan Meyyappan and David A Vidusek. These partnerships have further enriched his research and development efforts in the field.

Conclusion

Tatsuo Nakato's innovative work and numerous patents reflect his significant impact on semiconductor technology. His contributions continue to influence advancements in the industry, showcasing the importance of innovation in driving technological progress.

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