Shirakawa, Japan

Tatsuo Abe

USPTO Granted Patents = 12 

 

Average Co-Inventor Count = 2.2

ph-index = 2

Forward Citations = 10(Granted Patents)


Location History:

  • Fukushima, JP (1999 - 2012)
  • Nishishirakawa, JP (2011 - 2015)
  • Shirakawa, JP (2002 - 2024)

Company Filing History:


Years Active: 1999-2025

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12 patents (USPTO):Explore Patents

Title: Innovations of Tatsuo Abe

Introduction

Tatsuo Abe is a notable inventor based in Shirakawa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 12 patents. His work focuses on methods and apparatuses that enhance the efficiency and effectiveness of semiconductor processing.

Latest Patents

One of his latest patents is a method and apparatus for polishing wafers. This innovative method corrects the shape of polished wafers by pressing them against a polishing pad while continuously supplying a polishing composition containing water. The process includes measuring the shape of the polished wafer before correction and determining the appropriate surfactant concentration for optimal results. This advancement reduces variations in wafer shape that may occur during the polishing process.

Another significant patent by Abe is a method for forming a thermal oxide film on a semiconductor substrate. This method involves several steps, including cleaning the substrate, estimating the thickness of the thermal oxide film, and determining the necessary thermal oxidization treatment conditions. The goal is to ensure that the thermal oxide film reaches a predetermined thickness, which is crucial for semiconductor performance.

Career Highlights

Throughout his career, Tatsuo Abe has worked with prominent companies, including Shin-Etsu Handotai Co., Ltd. His expertise in semiconductor technology has made him a valuable asset in the industry.

Collaborations

Abe has collaborated with notable colleagues such as Kensaku Igarashi and Hitoshi Kabasawa. These partnerships have contributed to the advancement of semiconductor technologies and innovations.

Conclusion

Tatsuo Abe's contributions to semiconductor technology through his patents and collaborations highlight his importance as an inventor in the field. His innovative methods for wafer polishing and thermal oxide film formation continue to influence the industry positively.

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