This inventor holds 4 USPTO granted patents and 4 published patent applications. Top assignees: Asm Japan K.k., Tokyo Electron Limi Ted, Tokyo Electron Limited. Active years: 2010-2024.
Location History:
- Tama, JP (2010)
- Tokyo, JP (2020)
Company Filing History:
2 out of 194 
1 out of 103 
1 out of 10,883 
Years Active: 2010-2024
Title: The Innovations of Tamihiro Kobayashi
Introduction
Tamihiro Kobayashi is a notable inventor based in Tama, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 4 patents to his name, Kobayashi has developed innovative solutions that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Kobayashi's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features a processing chamber with a heating unit, a thermally isolated base, and a stage that holds the substrate. This design allows for precise control during the processing of substrates. Another significant patent is the vacuum processing apparatus, which performs vacuum processes by supplying processing gas onto substrates in a vacuum atmosphere. This apparatus includes multiple transfer spaces and processing spaces, optimizing the processing environment for substrates.
Career Highlights
Throughout his career, Kobayashi has worked with prominent companies such as ASM Japan K.K. and Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in substrate processing.
Collaborations
Kobayashi has collaborated with esteemed colleagues, including Takayuki Yamagishi and Akira Watanabe. These partnerships have fostered innovation and have led to the development of advanced processing technologies.
Conclusion
Tamihiro Kobayashi's contributions to substrate processing technology are noteworthy. His patents reflect a commitment to innovation and excellence in the field. His work continues to influence the industry and pave the way for future advancements.