The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Feb. 18, 2005
Applicants:
Naoto Tsuji, Tama, JP;
Hideaki Fukuda, Tama, JP;
Hiroki Arai, Tama, JP;
Yoshinori Morisada, Tama, JP;
Tamihiro Kobayashi, Tama, JP;
Inventors:
Naoto Tsuji, Tama, JP;
Hideaki Fukuda, Tama, JP;
Hiroki Arai, Tama, JP;
Yoshinori Morisada, Tama, JP;
Tamihiro Kobayashi, Tama, JP;
Assignee:
ASM Japan K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A shower platehas protrusionsformed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portionis left around apertures of gas inlet holesformed in the shower plate. With protrusionsbeing formed, a surface area of the first electrode is increased.